Tel : +33 5 61 55 84 77
Fax : + 33 5 61 55 64 52
Address :
LAPLACE - Laboratoire Plasma et Conversion d’Energie
Université Paul Sabatier - Bat 3R3
118 route de Narbonne
31062 TOULOUSE Cedex 09 - FRANCE
Fields of Scientific Interest :
- Physics and physico-chemistry of microwave/RF plasma processes.
- Low pressure and low temperature plasmas.
- Thin film synthesis from organosilicon and organometallic precursors
- Applications : Coatings and surface treatments, nanolayering, nanoclustering, …
- Applications Fields : Optic, microelectronic, packaging, biomedical, energy,
Affiliations :
- since 1992 : Scientific Researcher at CNRS, Laboratory of Plasma and Conversion of Energy-LAPLACE, Toulouse (France)
- nov. 1991-sept. 1992 : Post-doctoral Fellow, Electrical engineering Laboratory (LGET), Toulouse (France), “Study of very low pressure microwave plasma by means of FTIR spectroscopy”.
- oct. 1988-oct.1991 : PhD student, Laboratoire de physique et chimie des procédés plasma (LCP3- CNRS-UA 0844) and Centre National d’Etude des Télécom (CNET) Grenoble (France), “Silicon cleaning by microwave DECR plasma of Argon and/or Hydrogen, Study of hydrogen desorption”.
Education :
- Habilitation à Diriger les recherches (HDR) Toulouse III University (France), 2004
- Ph.D., Speciality : plasma physic, Joseph Fourier University, Grenoble (France), 1991
- Master of Science, Speciality : plasma physic, Toulouse III University (France), 1986
Dernières Publications :
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K. Isoird, L. Ottaviani, Marie-Laure Locatelli, D. Planson, C. Raynaud, P. Bevilacqua, J. -P. Chante,
Study of the Breakdown Voltage of Protected or Non-Protected 6H-SiC Bipolar Diodes by OBIC CharacterisationPages : 1363-1366 - Périodique : Materials Science Forum - Volume : 338-342Lien : https://hal.archives-ouvertes.fr/hal-02281030 -
Y. Fermi, M. Kihel, S. Sahli, Patrice Raynaud,
Synthesis of nanopowders in a PECVD reactor from organosilicon precursorPériodique : Phosphorus, Sulfur, and Silicon and the Related ElementsLien : https://doi.org/10.1080/10426507.2019.1631311 -
Olivier Antonin (Auteur), Patrice Raynaud (Directeur de thèse),
Dépôt par plasma à basse température de Nano-cristaux de diamant (NCD)