A wide range of pressure (from 1mTorr to atmospheric pressure) and frequency (from 50 Hz to 2.45 GHz) Plasma reactors are available in MPP research group :
- 4 Atmospheric Pressure homogeneous DBD reactors, one of them allowing roll to roll process.
- 10 low pressure reactors :
- 1 low frequency discharge.
- 4 RF discharges (13.56 MHz).
- 1 cold remote fluidized bed (2,45 GHz).
- 4 microwave discharges (2,45 GHz) : 2 DECR, 1 linear and 1 matrix.
 Nitrogen post-discharge assisted deposition on powders in a fluidized bed |
 Thin film deposition on roll to roll process by atmospheric pressure plasma (DBD) |
 RF diode discharge |
 DECR micro-wave reactor for etching and deposition on Si wafer |