Gas and plasma phase analysis :
- Electrical :
- Langmuir probe,
- Power measurement,
- Discharge current measurement.
- Optical :
- UV – Visible emission spectroscopy (OES),
- Time resolved (7 ns) fast imaging,
- Fourier Transform Infrared absorption spectroscopy (FTIR),
- - Laser diagnostics : 1 or 2 photons Laser Induced fluorescence (LIF, TALIF), High sensitivity absorption (CRDS, wide bandgap).
- Mass Spectroscopy.
- 1 Hiden Quadrupole Mass spectrometer for Mass/energy analyzer for ions, neutrals and radicals from plasma, Mass range : 300 amu.
Material or solid phase analysis (CARMAT platform) :
- Scanning Electron Microscope (SEM).
- Contact profilometer.
- Infrared spectroscopy (FTIR) : Absorption, Variable Angle Reflexion.
- UV – Vis., Near IR Spectroscopic Ellipsometer.
- Spectrofluorimeter.
- Electrical measurements : Conductivity ; dielectric Loss, C(V), C(f).
- Contact angle measurement : wetability and surface energy.
 Laser diagnostic platform for gas and plasma phases analysis (LIF – TALIF – CRDS) |
 Comparison between experimental and calculated spectra (Nitrogen second positive system) |
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Time resolved measurement of electronic temperature along the reactor radius in a CH4 MMP – DECR reactor (wall position : r = 0, diffusion plasma for r > 100). Hot electrons (red) are confined in high magnetic field zones (Festons) |
 Picture of a Filamentary discharge from ICCD camera (exposure time = 10 ns) |
 Dust trajectories in very low pressure MMP – DECR. Dusts are confined (or trapped) in high magnetic field zones (Festons). Their helicoidal trajectories show the magnetic field effect on their growing mode (or formation). |