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Accueil > Groupes de Recherche > Matériaux et Procédés Plasma > Moyens expérimentaux et de calcul

Diagnostics

par Nicolas Naudé - publié le , mis à jour le

Gas and plasma phase analysis :

  • Electrical :
    • Langmuir probe,
    • Power measurement,
    • Discharge current measurement.
  • Optical :
    • UV – Visible emission spectroscopy (OES),
    • Time resolved (7 ns) fast imaging,
    • Fourier Transform Infrared absorption spectroscopy (FTIR),
    • - Laser diagnostics : 1 or 2 photons Laser Induced fluorescence (LIF, TALIF), High sensitivity absorption (CRDS, wide bandgap).
  • Mass Spectroscopy.
    • 1 Hiden Quadrupole Mass spectrometer for Mass/energy analyzer for ions, neutrals and radicals from plasma, Mass range : 300 amu.

Material or solid phase analysis (CARMAT platform) :

  • Scanning Electron Microscope (SEM).
  • Contact profilometer.
  • Infrared spectroscopy (FTIR) : Absorption, Variable Angle Reflexion.
  • UV – Vis., Near IR Spectroscopic Ellipsometer.
  • Spectrofluorimeter.
  • Electrical measurements : Conductivity ; dielectric Loss, C(V), C(f).
  • Contact angle measurement : wetability and surface energy.
Laser diagnostic platform for gas and plasma phases analysis (LIF – TALIF – CRDS) Comparison between experimental and calculated spectra (Nitrogen second positive system)
Time resolved measurement of electronic temperature along the reactor radius in a CH4 MMP – DECR reactor (wall position : r = 0, diffusion plasma for r > 100). Hot electrons (red) are confined in high magnetic field zones (Festons)
Picture of a Filamentary discharge from ICCD camera (exposure time = 10 ns) Dust trajectories in very low pressure MMP – DECR. Dusts are confined (or trapped) in high magnetic field zones (Festons). Their helicoidal trajectories show the magnetic field effect on their growing mode (or formation).